제품소개

Transfer Module

Transfer Module_TV-4000

  • ·High Throughput & Reliability
  • ·Customizing Tool
  • ·Easy Maintenance
  • ·Ether CAT _ High Speed Control

Transfer Module_TVT-4000

  • ·Tandem TM (Up to 3TMs)
  • ·High Throughput & Reliability
  • ·Customizing Tool
  • ·Easy Maintenance
  • ·Ether CAT _ High Speed Control

Transfer Module_TVHT-4000

  • ·Horizontal Tandem TM
  • ·Independent TM/LL
  • ·High Throughput & Reliability
  • ·Customizing Tool
  • ·Easy Maintenance
  • ·Ether CAT _ High Speed Control

Transfer Module_TV-6000

  • ·200 & 300mm Wafer
  • ·Up to 8 Sided TM for 6 PMs
  • ·2 Loadlock with Vacuum Indexer
  • ·Manual or Automatic Door Selectable